Acoustic Wave Microsensors

Acoustic wave microsensors are being used for broader applications in chemical sensing and interfacial studies as more devices are invented and new sensor response mechanisms are elucidated. This report compares and contrasts the more commonly used acoustic wave devices and provide a current description of the physical origins of observed sensor responses in both gas- and liquid-phase studies. The types of waves and devices as well as information on operation and measurement methods, mass sensitivity, and detection are discussed. We focus primarily on thickness-shear mode (TSM), surface acoustic wave (SAW), flexural plate wave (FPW), and acoustic plate mode (APM) devices. 65 refs., 4 figs., 2 tabs.

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