论文信息 - Laser annealed SiGe devices for MEMS applications at temperatures below 250°C - 字舞流文

Laser annealed SiGe devices for MEMS applications at temperatures below 250°C

C. van Hoof | R. Puers | S. Sedky | D. Lin | S. Severi | A. Witvrouw | R. Van Hoof | J. El-Rifai