Thermal Isolation of Encapsulated MEMS Resonators
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M. Agarwal | Bongsang Kim | R. Melamud | M. Hopcroft | S. Chandorkar | R. Melamud | M. Agarwal | C. Jha | Bongsang Kim | J. Salvia | T.W. Kenny | R.N. Candler | S.A. Chandorkar | C.M. Jha | M.A. Hopcroft | J.C. Salvia | Thomas W. Kenny | N. Candler
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