Development of 60kV Pulse Power Generator Based on IGBT Stacks for Wide Application
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[1] R. J. Adler,et al. Thyratron modulators in plasma source ion implantation , 1995, Digest of Technical Papers. Tenth IEEE International Pulsed Power Conference.
[2] Dan M. Goebel. High power modulator for plasma ion implantation , 1994 .
[3] S. Shenderey,et al. IGBT Stacks Based Pulse Power Generator for PIII&D , 2005, 2005 IEEE Pulsed Power Conference.
[4] J. Genovese,et al. BEAM SWITCH TUBE MODULATOR TECHNOLOGY FOR PLASMA ION IMPLANTATION BROAD INDUSTRIAL APPLICATIONS , 1993, Ninth IEEE International Pulsed Power Conference.
[5] André Anders,et al. Handbook of plasma immersion ion implantation and deposition , 2004 .
[6] Jih-Sheng Lai,et al. Solid state Marx Generator using series-connected IGBTs , 2004, IEEE Transactions on Plasma Science.
[7] S. Shenderey,et al. Semiconductor switches based pulse power generator for plasma source ion implantation , 2004, Conference Record of the Twenty-Sixth International Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop..