Formation and characterization of silicon/carbon nanotube/silicon heterojunctions by local synthesis and assembly

This work investigates the formation of silicon/multiwalled carbon nanotube/silicon heterojunctions by in situ synthesizing carbon nanotubes between two heavily doped, suspended silicon microstructures that are separated 5–10μm apart using the techniques of localized heating and electric-field-assisted self-assembly. The local electric field has the strength of 0.2–1V∕μm. Tip- and root-grown carbon nanotubes are observed to form two different heterojunction morphologies at the tips as the former stop to grow and the latter continue to grow as the growth tips of carbon nanotubes reach the cold silicon. Experimental measurements of the silicon/carbon nanotube/silicon system show linear current-voltage characteristics indicating Ohmic contact behavior.

[1]  H. Lezec,et al.  Electrical conductivity of individual carbon nanotubes , 1996, Nature.

[2]  Jing Kong,et al.  Electric-field-directed growth of aligned single-walled carbon nanotubes , 2001 .

[3]  T. Ebbesen,et al.  Exceptionally high Young's modulus observed for individual carbon nanotubes , 1996, Nature.

[4]  John Robertson,et al.  Temperature selective growth of carbon nanotubes by chemical vapor deposition , 2002 .

[5]  H. Dai,et al.  Modulated chemical doping of individual carbon nanotubes. , 2000, Science.

[6]  Liwei Lin,et al.  Local synthesis of silicon nanowires and carbon nanotubes on microbridges , 2003 .

[7]  Charles M. Lieber,et al.  Logic Gates and Computation from Assembled Nanowire Building Blocks , 2001, Science.

[8]  E. Bekyarova,et al.  Applications of Carbon Nanotubes in Biotechnology and Biomedicine. , 2005, Journal of biomedical nanotechnology.

[9]  S. Sze Semiconductor Devices: Physics and Technology , 1985 .

[10]  Jeffrey Bokor,et al.  Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology , 2004 .

[11]  K. Ng,et al.  On the calculation of specific contact resistivity on , 1990 .

[12]  Enge Wang,et al.  Field emission of individual carbon nanotube with in situ tip image and real work function , 2005 .

[13]  K. Kano Semiconductor Devices , 1997 .

[14]  Jiangtao Hu,et al.  Controlled growth and electrical properties of heterojunctions of carbon nanotubes and silicon nanowires , 1999, Nature.

[15]  K. Ng,et al.  The Physics of Semiconductor Devices , 2019, Springer Proceedings in Physics.

[16]  Ant Ural,et al.  Electric-field-aligned growth of single-walled carbon nanotubes on surfaces , 2002 .

[17]  F. Ducastelle,et al.  Root-growth mechanism for single-wall carbon nanotubes. , 2001, Physical review letters.

[18]  Zhengwei Pan,et al.  Work function at the tips of multiwalled carbon nanotubes , 2001 .

[19]  Liwei Lin,et al.  Electric-field assisted growth and self-assembly of intrinsic silicon nanowires. , 2005, Nano letters.