Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques (Review Paper)

Recently, a lot of attention has been paid to infrared imaging using uncooled microbolometer detectors, primarily because of their low cost, and wide military and civilian applications. This paper reviews the basic principles of these detectors and some of the important works done internationally in this field. This paper presents some of the research work on titanium microbolometer carried out at Solid State Physics Laboratory, Delhi. Defence Science Journal, 2009, 59(6), pp.580-589 , DOI:http://dx.doi.org/10.14429/dsj.59.1562

[1]  T. Tanaka,et al.  Infrared focal plane array incorporating silicon IC process compatible bolometer , 1996 .

[2]  Jean-Jacques Yon,et al.  320 x 240 microbolometer uncooled IRFPA development , 2000, SPIE Optics + Photonics.

[3]  Kevin Charles Liddiard,et al.  Thin-film monolithic detector arrays for uncooled thermal imaging , 1993, Defense, Security, and Sensing.

[4]  Robert J. Herring,et al.  Design and performance of the ULTRA 320x240 uncooled focal plane array and sensor , 1996, Defense + Commercial Sensing.

[5]  R. A. Wood,et al.  Uncooled thermal imaging with monolithic silicon focal planes , 1993, Optics & Photonics.

[6]  Tayfun Akin,et al.  A low-cost uncooled infrared microbolometer detector in standard CMOS technology , 2003 .

[7]  Tayfun Akin,et al.  Low-cost uncooled infrared detectors in CMOS process , 2003 .

[8]  Litian Liu,et al.  An uncooled microbolometer infrared detector based on poly-SiGe thermistor , 2003 .

[9]  Göran Stemme,et al.  Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure , 2008 .

[10]  Christian Menolfi,et al.  Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array , 2001 .

[11]  F. F. Sizov.  Infrared detectors: outlook and means , 2000 .

[12]  Antoni Rogalski,et al.  HgCdTe infrared detector material: history, status and outlook , 2005 .

[13]  Yasushi Nakajima,et al.  120 × 90 element thermoelectric infrared focal plane array with precisely patterned Au-black absorber , 2000 .

[14]  G. Fedder,et al.  Laminated high-aspect-ratio microstructures in a conventional CMOS process , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[15]  A. Tanaka,et al.  Silicon IC Process Compatible Bolometer Infrared Focal Plane Array , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[16]  C. R. Jalwania,et al.  A Novel Test Structure for Process Control Monitor for Un-Cooled Bolometer Area Array Detector Technology , 2006 .

[17]  Masafumi Kimata,et al.  Performance of 320 x 240 uncooled IRFPA with SOI diode detectors , 2000, SPIE Optics + Photonics.

[18]  Jean-Louis Ouvrier-Buffet,et al.  Amorphous-silicon-based uncooled microbolometer IRFPA , 1999, Defense, Security, and Sensing.

[19]  C. R. Jalwania,et al.  Characterization of area arrays of microbolometer-based un-cooled IR detectors without using ROIC , 2008 .

[20]  A. Rogalski.  Infrared detectors: status and trends , 2003 .

[21]  J. L. Tissot.  IR detection with uncooled focal plane arrays. State-of-the art and trends , 2004 .

[22]  P. Neuzil,et al.  A method of suppressing self-heating signal of bolometers , 2004, IEEE Sensors Journal.

[23]  Hyun-Joon Shin,et al.  Characterization of uncooled bolometer with vanadium tungsten oxide infrared active layer , 2005 .

[24]  Donald P. Butler,et al.  A semiconductor YBaCuO microbolometer for room temperature IR imaging , 1997 .

[25]  Göran Stemme,et al.  Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays , 2001 .

[26]  Jin-Shown Shie,et al.  Characterization and modeling of metal-film microbolometer , 1996 .

[27]  R. K. Bhan,et al.  A new discrete circuit for readout of resistive sensor arrays , 2009 .

[28]  Yoshio Fujii,et al.  640 x 480 pixel uncooled infrared FPA with SOI diode detectors , 2005, SPIE Defense + Commercial Sensing.

[29]  Sherif Sedky,et al.  Characterization and optimization of infrared poly SiGe bolometers , 1999 .

[30]  Masafumi Kimata,et al.  YBaCuO uncooled microbolometer IRFPA , 2001, SPIE Defense + Commercial Sensing.

[31]  K. Ping,et al.  Design considerations of metal-film bolometer with micromachined floating membrane , 1992 .

[32]  Masafumi Kimata,et al.  SOI diode uncooled infrared focal plane arrays , 2006, SPIE OPTO.

[33]  Gamani Karunasiri,et al.  Determination of thermal parameters of microbolometers using a single electrical measurement , 1998 .

[34]  Jean-Jacques Yon,et al.  Uncooled amorphous silicon technology enhancement for 25-μm pixel pitch achievement , 2003, SPIE Optics + Photonics.

[35]  Hubert Jerominek,et al.  Micromachined VO2-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics , 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.