Tribological properties of polished diamond films

Despite the rapid progress being made in the synthesis of diamond films and recent interest in polishing of diamond films, no systematic measurements of friction and wear on polished diamond films have been reported. In the present study, chemomechanical and laser polishing techniques are used, and friction and wear data on the chemomechanically polished diamond films are presented. With the chemomechanical polishing technique used in this study, the rms roughness of hot filament chemical vapor deposited diamond films can be reduced from about 657 to about 170 nm with rounding off of sharp asperities with no change in the diamond structure. The polished films exhibit coefficient of friction (∼0.1) and wear rates much lower than that of unpolished films. Friction and wear properties of the polished films are comparable to that of single‐crystal natural diamond. Based on this study, it is concluded that polished films are potential candidates for tribological applications.

[1]  C. Kuo,et al.  Adhesion and tribological properties of diamond films on various substrates , 1990 .

[2]  A. Smolin,et al.  Smoothening of diamond films with an ArF laser , 1992 .

[3]  I. L. Singer,et al.  Effect of roughness on the friction of diamond on cvd diamond coatings , 1992 .

[4]  H. Tokura,et al.  Study on the polishing of chemically vapour deposited diamond film , 1992 .

[5]  Tadao Inuzuka,et al.  Growth of diamond thin films by electron-assisted chemical vapour deposition and their characterization , 1986 .

[6]  S. A. Dregia,et al.  ON THE EFFECTS OF PHYSICAL ABRASION ON NUCLEATION AND GROWTH OF DIAMOND ON SILICON USING HOT FILAMENT CHEMICAL VAPOR DEPOSITION , 1991 .

[7]  B. Bhushan,et al.  Handbook of Tribology: Materials, Coatings, and Surface Treatments , 1991 .

[8]  Hemant D. Desai,et al.  Synthesis and characterization of fine grain diamond films , 1992 .

[9]  M. Gardos,et al.  The effect of environment on the tribological properties of polycrystalline diamond films , 1990 .

[10]  J. Field.  The Properties of Diamond , 1979 .

[11]  H A Macleod,et al.  Oxygen-ion beam polishing of a 5-cm-diameter diamond film. , 1992, Applied optics.

[12]  H. Macleod,et al.  Planarizing technique for ion-beam polishing of diamond films. , 1992, Applied optics.

[13]  T. Evans,et al.  A study of the transformation of diamond to graphite , 1964, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[14]  Wayne A. Weimer,et al.  Thermogravimetric analysis of the oxidation of CVD diamond films , 1990 .

[15]  M. Seal.  The Effect of Surface Orientation on the Graphitization of Diamond , 1963 .

[16]  S. Noda,et al.  Tribological characteristics of polycrystalline diamond films produced by chemical vapor deposition , 1992 .

[17]  L. C. Aamodt,et al.  Photoacoustic and Photothermal Phenomena II , 1990 .

[18]  James E. Butler,et al.  Polishing of filament-assisted CVD diamond films , 1991, Optics & Photonics.

[19]  D. E. Deckman,et al.  Tribological characteristics of synthesized diamond films on silicon carbide , 1989 .

[20]  M. Seal,et al.  The friction of diamond , 1981 .

[21]  Masanori Yoshikawa,et al.  Smoothing of chemically vapour deposited diamond films by ion beam irradiation , 1992 .

[22]  J. Butler,et al.  New diamond science and technology , 1991 .