Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope
暂无分享,去创建一个
[1] Andrzej Bartnik,et al. A 50 nm spatial resolution EUV imaging-resolution dependence on object thickness and illumination bandwidth. , 2011, Optics express.
[2] J A Liddle,et al. Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light. , 2006, Optics letters.
[3] Keiji Nagai,et al. Development of soft X-ray microscopy System using X-ray laser in JAERI Kansai , 2003 .
[4] Andrzej Bartnik,et al. A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength , 2010 .
[5] D. Attwood. Soft X-Rays and Extreme Ultraviolet Radiation , 1999 .
[6] Weilun Chao,et al. Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy. , 2009, Optics express.
[7] Andrzej Bartnik,et al. Compact laser plasma EUV source based on a gas puff target for metrology applications , 2005 .
[8] Larissa Juschkin,et al. EUV microscopy for defect inspection by dark-field mapping and zone plate zooming , 2009 .
[9] M Wieland,et al. Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation. , 2005, Ultramicroscopy.
[10] Przemyslaw Wachulak,et al. Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution. , 2008, Optics letters.
[11] E. Anderson,et al. Resolution determination in X-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum. , 1998, Journal of X-ray science and technology.
[12] Andrzej Bartnik,et al. Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source. , 2010, Optics letters.
[13] F Pedaci,et al. Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination. , 2009, Optics letters.
[14] Andrzej Bartnik,et al. “Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target , 2010 .
[15] A. I. Fedorenko,et al. Schwarzschild soft-x-ray microscope for imaging of nonradiating objects. , 1995, Optics letters.
[16] Yoshiharu Namba,et al. Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution , 2006, Physics in medicine and biology.