Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas

Conversion efficiencies (CEs) from incident laser energy to 13.5nm light within a 2% bandwidth were measured with changing laser pulse durations for laser-produced tin plasmas. Experimental results indicate that the optimum pulse duration is determined by two parameters: one is the optical depth of tin plasma for 13.5nm light and the other is laser absorption rate in 13.5nm emission-dominant region. The maximum CE of 2.2% is obtained with pulse duration of 2.3ns.

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