The Vertical Replacement-Gate (VRG) MOSFET: a 50-nm vertical MOSFET with lithography-independent gate length
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W. Lai | F. Baumann | D. Monroe | T. Sorsch | C. Pai | F. Klemens | J. Bower | W. Mansfield | H. Gossmann | D. Eaglesham | C. Rafferty | J. Hergenrother | G. Weber | M. R. Baker | K. Bolan | N. A. Ciampa | R. Cirelli | J. Colonell | J. Frackoviak | M.L. Green | S. Hillenius | C. King | R. Kleiman | J.T.-C. Lee | R.C. Liu | H. Maynard | M. Morris | S. Oh | J. Rosamilia | H. Vuong | M. Green | R. Liu
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