HIGH-QUALITY SURFACE MICROLENSES BASED ON REHYDRATION

This paper reports on the fundamental step needed for guaranteeing high-quality microsized, high-aspect ratio arrays of lenticular microlenses (MLs) fabricated with the AZ4562 photoresist (PR). The MLs were fabricated for a length of (but not restricted to) 4.9 mm and a width×thickness (at the apex) product of 24×5 μm. It is shown that during the fabrication process, the PR has to be rehydrated in order to obtain excellent results by preventing structural damages in the MLs crucial for achieving efficient optical properties.