Joint input shaping and feedforward for point-to-point motion : automated tuning for an industrial nanopositioning system
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Frank Boeren | Dennis Bruijnen | Tom Oomen | Niels van Dijk | T. Oomen | N. V. Dijk | D. Bruijnen | Frank Boeren
[1] Hua Zhong,et al. Feedforward control for disturbance rejection: Model matching and other methods , 2012, 2012 24th Chinese Control and Decision Conference (CCDC).
[2] Daniel Y. Abramovitch,et al. Analysis and comparison of three discrete-time feedforward model-inverse control techniques for nonminimum-phase systems☆ , 2012 .
[3] Frank Boeren,et al. Iterative feedforward control: a closed-loop identification problem and a solution , 2013, 52nd IEEE Conference on Decision and Control.
[4] Hui Li,et al. Reference Signal Shaping for Closed-Loop Systems With Application to Seeking in Hard Disk Drives , 2012, IEEE Transactions on Control Systems Technology.
[5] Lucy Y. Pao,et al. Nonminimum Phase Dynamic Inversion for Settle Time Applications , 2009, IEEE Transactions on Control Systems Technology.
[6] Masayoshi Tomizuka,et al. A Comparative Study of Feedforward Tuning Methods for Wafer Scanning Systems , 2008 .
[7] Tom Oomen,et al. Inferential motion control: Identification and robust control with unmeasured performance variables , 2011, IEEE Conference on Decision and Control and European Control Conference.
[8] Wodek Gawronski,et al. Advanced Structural Dynamics and Active Control of Structures , 2004 .
[9] Okko Bosgra,et al. Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer , 2008 .
[10] Niels van Dijk,et al. Combined input shaping and feedforward control for flexible motion systems , 2012, 2012 American Control Conference (ACC).
[11] M Maarten Steinbuch,et al. MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm , 2010 .
[12] Marc M. J. van de Wal,et al. Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage , 2014, IEEE Transactions on Control Systems Technology.
[13] Qingze Zou,et al. A review of feedforward control approaches in nanopositioning for high-speed spm , 2009 .
[14] Santosh Devasia,et al. Should model-based inverse inputs be used as feedforward under plant uncertainty? , 2002, IEEE Trans. Autom. Control..
[15] Maarten Steinbuch,et al. Accuracy aspects in motion feedforward tuning , 2014, 2014 American Control Conference.
[16] A.G. Alleyne,et al. A survey of iterative learning control , 2006, IEEE Control Systems.
[17] Håkan Hjalmarsson,et al. Iterative feedback tuning—an overview , 2002 .
[18] Qingze Zou. Optimal preview-based stable-inversion for output tracking of nonminimum-phase linear systems , 2007, 2007 46th IEEE Conference on Decision and Control.
[19] Craig F. Cutforth,et al. Adaptive input shaping for maneuvering flexible structures , 2004, Autom..
[20] Maarten Steinbuch,et al. Exploiting rational basis functions in iterative learning control , 2013, 52nd IEEE Conference on Decision and Control.
[21] William Singhose,et al. Command shaping for flexible systems: A review of the first 50 years , 2009 .
[22] Tom Oomen,et al. Suppressing intersample behavior in Iterative Learning Control , 2008, IEEE Conference on Decision and Control.
[23] Jeroen van de Wijdeven,et al. Using basis functions in iterative learning control: analysis and design theory , 2010, Int. J. Control.
[24] Okko H. Bosgra,et al. LPV control for a wafer stage: beyond the theoretical solution , 2005 .
[25] M Maarten Steinbuch,et al. Trajectory planning and feedforward design for electromechanical motion systems , 2005 .