论文信息 - Metalorganic vapor phase epitaxy growth of crack-free AlN on GaN and its application to high-mobility AlN/GaN superlattices - 字舞流文

Metalorganic vapor phase epitaxy growth of crack-free AlN on GaN and its application to high-mobility AlN/GaN superlattices

H. Amano | I. Akasaki | S. Nitta | S. Yamaguchi | M. Kosaki | Yasuyuki Watanabe | Y. Yukawa