论文信息 - Effect of hydrogen content on dielectric strength of the silicon nitride film deposited by ICP-CVD* - 字舞流文

Effect of hydrogen content on dielectric strength of the silicon nitride film deposited by ICP-CVD*

H. Cui | Shiwei Zhuang | Kaidong Xu | Jiale Tang | Yudong Zhang | Yongjie Hu | Jie Yuan | Lulu Guan | Xingyu Li | Guanghui Ding | Xinying Shi | Ding Guanghui