论文信息 - Wideband frequency and in situ characterization of aluminum nitride (AlN) in a metal/insulator/metal (MIM) configuration - 字舞流文

Wideband frequency and in situ characterization of aluminum nitride (AlN) in a metal/insulator/metal (MIM) configuration

T. Lacrevaz | C. Bermond | B. Fléchet | E. Defay | B. Salem | J. Abergel | T. Bertaud | S. Capraro