Thick films fabricated by laser ablation of PZT microparticles

Abstract The laser ablation of microparticles (LAM) process was used on PZT powders to produce nanoparticles that were then supersonically impacted onto substrates. The resulting films were found to be dense and adherent but were primarily amorphous. SEM and TEM observations showed that, unlike other materials that have been produced by the LAM process, the average compositions of these films differed substantially from the starting powders. Preliminary attempts to crystallize these films showed that some perovskite PZT could be formed by annealing the films at high temperature. However, large-scale composition variations present in the LAM-produced films inhibited crystallization at lower temperatures. The origin of these composition variations and their influence on crystallization are discussed.

[1]  Ryutaro Maeda,et al.  X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method , 1997 .

[2]  Robert W. Schwartz,et al.  Solution Deposition of Ferroelectric Thin Films , 1996 .

[3]  W. T. Nichols,et al.  Gas and Pressure Dependence for the Mean Size of Nanoparticles Produced by Laser Ablation of Flowing Aerosols , 2000 .

[4]  Timothy Sands,et al.  Preparation and Optical Characterization of Sol-Gel Deposited Pb(Zr0.45Ti0.55)O3 Films , 2000 .

[5]  C. Hsueh,et al.  Microstructural development and electrical properties of sol-gel prepared lead zirconate-titanate thin films , 1991 .

[6]  G. Hubler,et al.  Pulsed Laser Deposition of Thin Films , 2003, Handbook of Laser Technology and Applications.

[7]  Carl L. Yaws,et al.  Handbook of vapor pressure , 1994 .

[8]  Neil M. White,et al.  Thick-film printing of PZT onto silicon , 1997 .

[9]  W. T. Nichols,et al.  Large-scale production of nanocrystals by laser ablation of microparticles in a flowing aerosol , 2001 .

[10]  W. T. Nichols,et al.  Synthesis of Nanostructured WC Films by Supersonic Impaction of Nanoparticle Aerosols , 1999 .

[11]  Nitin Chaudhary,et al.  Generation of metal nanoparticles by laser ablation of microspheres , 1998 .

[12]  Jaemyoung Lee,et al.  Dynamics of laser ablation of microparticles prior to nanoparticle generation , 2001 .

[13]  E. Fuchita,et al.  Deposition of Ultra Fine Particles Using a Gas Jet , 1984 .

[14]  W. T. Nichols,et al.  Supersonic nanocrystal deposition for nanostructured materials , 2001 .

[15]  Jaemyoung Lee,et al.  Metal nanoparticles generated by laser ablation , 1998 .

[16]  Toru Fujii,et al.  Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering , 1995 .

[17]  K. M. Nair,et al.  Dielectric ceramics : processing, properties, and applications , 1993 .

[18]  W. T. Nichols,et al.  Bimodal Nanoparticle Size Distributions Produced by Laser Ablation of Microparticles in Aerosols , 2002 .