Statistical Analysis on the Random Performance of Micromachined Gyroscope Based on Perturbation Method

Focusing on a tuning fork vibratory gyroscope fabricated through silicon bulk micromachining,the matrix perturbation technology in the random finite element method was introduced to analyze the statistical characteristics of the natural frequencies and output capacitance of tuning fork vibratory gyroscope.The influences of random material parameters and dimensional parameters on the performance of a microgyroscope were quantitatively described by a so-called impact factor based on the probability theory.The impact factors exactly point out the sensitivity of parameters variance to performance variance and finally bring out the five key parameters of a microgyroscope.These numerable key parameters not only simplify the dimensions of design space for the robust optimization design of a microgyroscope,but also provide a special quantitative reference to the accuracy control in the fabrication procedures of microgyroscopes.