GaAs p- and n-MOS devices integrated with novel passivation (plasma nitridation and AlN-surface passivation) techniques and ALD-HfO2/TaN gate stack
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S. Balakumar | Fei Gao | D. Kwong | D. Chi | Rui Li | C. Tung | S.J. Lee | S. Vicknesh | S. Whang | Chia Ching Kean | F. Gao