The selfpriming VAMP

The VAMP is a miniaturized device which is both, an active microvalve and a forward and reverse working micropump (VAMP=Valve And MicroPump). Operating in the valve mode, the device enables fluid to flow or blocks it. Operating in the pump mode, fluids can be pumped in both directions. The pump direction can be controlled by the driving frequency of the actuator. After recent optimization of the geometry and especially after optimization of the pump chamber height, we now achieved selfpriming of the VAMP with liquids. The VAMP has been manufactured in a small-lot production and is available for industrial evaluation.

[1]  Roland Zengerle,et al.  A new micropump with bidirectional fluid transport and selfblocking effect , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.