A 64K SRAM with high immunity from heavy ion induced latch-up

A 64-kbit SRAM with high latch-up immunity has been developed with the application of a well-source structure combined with an epi-substrate. Heavy-ion beam exposure tests reveal that the device has high immunity from cosmic-ray induced latch-up, and the soft-error cross section is about 8.6 × 10-7cm2/(bit particle) for 73-MeV Ar ions.

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