论文信息 - Elimination of AlGaN epilayer cracking by spatially patterned AlN mask - 字舞流文

Elimination of AlGaN epilayer cracking by spatially patterned AlN mask

P. Perlin | R. Czernecki | M. Kryśko | M. Leszczyński | M. Sarzyński | G. Targowski | A. Sarzyńska | A. Libura | W. Krupczyński