Electro-Thermo-Mechanical Characterizations of Various Wire Bonding Interconnects Illuminated by an Electromagnetic Pulse

A comprehensive electro-thermo-mechanical transient investigation is carried out to characterize time-dependent thermal and mechanical responses of metal wire bonding interconnects, as they suffer from the impact of an electromagnetic pulse (EMP) with different current or voltage waveforms. In our mathematical implementation, a hybrid time-domain finite element method is applied to simulate mutual interactions among electrical, thermal, and mechanical fields, with all nonlinearities of temperature-dependent electrical conductivities, thermal conductivities, thermal expansion coefficients, and even the Young's modulus of materials being treated appropriately. The developed algorithm is partially validated by computing transient temperature and thermal stress of other interconnects with good agreement with reference results. Parametric studies are performed to show the effects of EMP waveform parameters, geometrical and physical parameters of various wire bonding interconnects on their transient thermal and mechanical responses, thus providing basic information for their electromagnetic protection so as to suppress the impact of an intentional EMP.

[1]  S. Timoshenko,et al.  Theory of Elasticity (3rd ed.) , 1970 .

[2]  J. Yeh,et al.  Return loss reduction of molded bonding wires by comb capacitors , 2006, IEEE Transactions on Advanced Packaging.

[3]  Y. Ciftci,et al.  Temperature and pressure dependence of the some elastic and lattice dynamical properties of copper : a molecular dynamics study , 2006 .

[4]  J.L. ter Haseborg,et al.  Susceptibility of some electronic equipment to HPEM threats , 2004, IEEE Transactions on Electromagnetic Compatibility.

[5]  Qing Huo Liu,et al.  Transient Electrothermal Analysis of Multilevel Interconnects in the Presence of ESD Pulses Using the Nonlinear Time-Domain Finite-Element Method , 2009, IEEE Transactions on Electromagnetic Compatibility.

[6]  Paul S. Ho,et al.  Thermal stress characteristics of Cu/oxide and Cu/low-k submicron interconnect structures , 2003 .

[7]  I. De Wolf,et al.  Mechanical issues of Cu-to-Cu wire bonding , 2004, IEEE Transactions on Components and Packaging Technologies.

[8]  Manos M. Tentzeris,et al.  Experimental modeling, repeatability investigation and optimization of microwave bond wire interconnects , 2001 .

[9]  L. Parrini,et al.  New techniques for the design of advanced ultrasonic transducers for wire bonding , 2003 .

[10]  Naoki Ono,et al.  Measurement of Young's Modulus of Silicon Single Crystal at High Temperature and Its Dependency on Boron Concentration Using the Flexural Vibration Method , 2000 .

[11]  Chao-Ton Su,et al.  Optimal design for a ball grid array wire bonding process using a neuro-genetic approach , 2002 .

[12]  G. T. Nobauer,et al.  Analytical approach to temperature evaluation in bonding wires and calculation of allowable current , 2000 .

[13]  Jae-Sung Rieh,et al.  RF characterization and modeling of various wire bond transitions , 2005, IEEE Transactions on Advanced Packaging.

[14]  Jian-Qiang Lu,et al.  Modeling Thermal Stresses in 3-D IC Interwafer Interconnects , 2006, IEEE Transactions on Semiconductor Manufacturing.

[15]  Inspec Properties of silicon , 1988 .

[16]  A.G.K. Viswanath,et al.  Numerical Study of Gold Wire Bonding Process on Cu/Low-k Structures , 2007, IEEE Transactions on Advanced Packaging.

[17]  G. Leonhardt,et al.  Electromagnetic simulation of bonding wires and comparison with wide band measurements , 2000 .

[18]  Werner Weber,et al.  Thermal conductivity measurements of thin silicon dioxide films in integrated circuits , 1996 .

[19]  M. Camp,et al.  Predicting the breakdown behavior of microcontrollers under EMP/UWB impact using a statistical analysis , 2004, IEEE Transactions on Electromagnetic Compatibility.

[20]  Werner Weber,et al.  Thermal Conductivity of Thin Silicon Dioxide Films in Integrated Circuits , 1995, ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference.

[21]  W.A. Radasky,et al.  Introduction to the special issue on high-power electromagnetics (HPEM) and intentional electromagnetic interference (IEMI) , 2004, IEEE Transactions on Electromagnetic Compatibility.

[22]  R. Hoad,et al.  Trends in EM susceptibility of IT equipment , 2004, IEEE Transactions on Electromagnetic Compatibility.

[23]  Hui Zhou,et al.  Novel Parameter Estimation of Double Exponential Pulse (EMP, UWB) by Statistical Means , 2008, IEEE Transactions on Electromagnetic Compatibility.

[24]  W. Yin,et al.  Frequency-Thermal Characterization of On-Chip Transformers With Patterned Ground Shields , 2007, IEEE Transactions on Microwave Theory and Techniques.

[25]  Xiaoning Qi,et al.  A fast 3D modeling approach to electrical parameters extraction of bonding wires for RF circuits , 2000 .

[26]  Hen-So Chang,et al.  Wire-bond void formation during high temperature aging , 2004, IEEE Transactions on Components and Packaging Technologies.