A novel technique for the preservation of gratings in InP and InGaAsP and for the simultaneous preservation of InP, InGaAs, and InGaAsP in OMCVD
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C. Zah | C. Caneau | A. Yi-yan | R. Bhat | A. Góźdź | P. Lin | S. Schwarz | C. C. Chang | M. Koza