Recent advances in EUV patterning in preparation towards high-NA EUV
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K. Nafus | M. Demand | Y. Feurprier | S. Nagahara | P. Foubert | S. Kawakami | R. Ramaneti | A. Thiam | C. Dinh | M. Muramatsu | Arnaud Dauendorffer | D. De Simone | Soichiro Okada | S. Shimura | Yuhei Kuwahara | Xiang Liu | H. Genjima | Noriaki Nagamine | A. Tsuboi | Geert Vendenberghe