Highly Manufacturable Single-Bridge-Channel MOSFET (SBCFET)

Modifying the multi-bridge-channel MOSFET (MBCFET) process, we have successfully fabricated single-bridge-channel MOSFET (SBCFET). Due to reduced epitaxial growth steps and simple ion implantation process, the SBCFET has manufacture-worthy simple fabrication process like conventional planar transistor. The current drivability of SBCFET shows 2.0 mA/mum @ 100 pA/mum off-current in 1.0 V operation