Research of Laser Marking Process for Ceramic Packaging

As a new type of marking technology,laser marking has the more important applications in semiconductor industry.This article introduces the theory and control systems of laser marker briefly,and analyzes the marking effects by the experiments of the laser marking parameters such as power,frequency,speed and delay on nickel-plated Kovar lid.The research shows that the marking effects of laser power and speed present linear rule,frequency doesn’t present linear rule but exists the best area;the improper settings of delay parameter cause some marking points too deep,lost or make the characters deformation and so on.