Confocal microscopy for the testing of integrated optical devices

Planar waveguides have been realized in lithium fluoride crystals by ion-beam irradiation. Ion bombardment produces color centers in the LiF crystal, increasing locally the refractive index. Confocal microscopy is applied to the characterization of the waveguides in order to assess the uniformity and distribution of color centers through the measurement of the photoluminescence emission.