论文信息 - Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon - 字舞流文

Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon

E. Garutti | J. Schwandt | I. Pintilie | L. Makarenko | M. Moll | L. Filip | E. Fretwurst | Y. Gurimskaya | A. Himmerlich | C. Liao | Zheng Li | E. Garutti