论文信息 - Stacked double-layer nanomembrane Fano modulators

Stacked double-layer nanomembrane Fano modulators

We report a novel bi-layer photonic crystal slab (PCS) Fano modulator via a coupled double-layer Si nanomembrane (SiNM) capacitor like structure. Surface normal incident light intensity modulation near 1500nm was achieved by carrier accumulation induced resonance spectral shifting. Device performance simulation suggests the opportunity for high speed modulation exceeding GHz with 20μm × 20μm device size.

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