论文信息 - Direct current magnetron sputtered ZrB2 thin films on 4H-SiC(0001) and Si(100) - 字舞流文

Direct current magnetron sputtered ZrB2 thin films on 4H-SiC(0001) and Si(100)

E. Janzén | Jun Lu | L. Hultman | U. Forsberg | M. Samuelsson | J. Jensen | H. Högberg | Lina Tengdelius | E. Janzén