论文信息 - Improved LPCVD-SiNx/AlGaN/GaN MIS-HEMTs by using in-situ MOCVD-SiNx as an interface sacrificial layer - 字舞流文

Improved LPCVD-SiNx/AlGaN/GaN MIS-HEMTs by using in-situ MOCVD-SiNx as an interface sacrificial layer

Dunjun Chen | Hai Lu | Youdou Zheng | Hui Guo | D. Pan | Peng Chen | Rui Wang | Haineng Bai | Rong Zhang | Changkun Zeng | Pengfei Shao