Diffractive components: computer-generated elements

Highly efficient diffractive optical elements (DOEs) can also be realized using modern microfabrication technologies. Computer-generated data for arbitrary phase profiles can be transformed into optical elements. These elements offer optimum design freedom and established fabrication technology.

[1]  H. Lehmann V-1 – Plasma-Assisted Etching , 1991 .

[2]  H. Nishihara,et al.  Laser beam lithographed micro-Fresnel lenses. , 1990, Applied optics.

[3]  W. Moreau Semiconductor Lithography: Principles, Practices, and Materials , 1987 .

[4]  Henry I. Smith,et al.  Holographic lithography with thick photoresist , 1983 .

[5]  R. McPhedran,et al.  The Finitely Conducting Lamellar Diffraction Grating , 1981 .

[6]  Michael T. Gale,et al.  The Fabrication Of Fine Lens Arrays By Laser Beam Writing , 1983, Other Conferences.

[7]  Joseph N. Mait,et al.  Design of binary-phase and multiphase Fourier gratings for array generation , 1990 .

[8]  M T Eismann,et al.  Iterative design of a holographic beamformer. , 1989, Applied optics.

[9]  H. Huber,et al.  Critical dimension control in X-ray masks with electroplated gold absorbers , 1986 .

[10]  R. Gerchberg A practical algorithm for the determination of phase from image and diffraction plane pictures , 1972 .

[11]  H. C. Pfeiffer,et al.  Progress in E-Beam making for optical and X-Ray lithography , 1991 .

[12]  H. Dammann,et al.  High-efficiency in-line multiple imaging by means of multiple phase holograms , 1971 .

[13]  M R Taghizadeh,et al.  Binary surface-relief gratings for array illumination in digital optics. , 1992, Applied optics.

[14]  Norbert Streibl,et al.  Beam Shaping with Optical Array Generators , 1989 .

[15]  Mohammad R. Taghizadeh,et al.  Rigorous diffraction analysis of Dammann gratings , 1991 .

[16]  M. Taghizadeh,et al.  Detour-phase kinoform interconnects: the concept and fabrication considerations , 1990 .

[17]  C. D. Gelatt,et al.  Optimization by Simulated Annealing , 1983, Science.

[18]  A Huang,et al.  Planar integration of free-space optical components. , 1989, Applied optics.

[19]  Karl Knop,et al.  Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves , 1978 .

[20]  John C. Matthews,et al.  Microlithography Techniques Using A Microwave Powered Deep UV Source , 1983, Advanced Lithography.

[21]  J. Coburn,et al.  Plasma-assisted etching , 1982 .

[22]  A. A. Friesem,et al.  Optimized holographic optical elements , 1986 .

[23]  Jari Turunen,et al.  Optimization Of Holographic Optical Systems By Damped Least Squares And Wavefront Matching Techniques , 1988, Photonics West - Lasers and Applications in Science and Engineering.

[24]  J. Goodman Introduction to Fourier optics , 1969 .

[25]  Gary J. Swanson,et al.  Binary Optics Technology: Theoretical Limits on the Diffraction Efficiency of Multilevel Diffractive Optical Elements , 1991 .

[26]  William H. Press,et al.  Numerical recipes , 1990 .

[27]  K. Wasa,et al.  Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithography. , 1987, Applied optics.

[28]  Thomas K. Gaylord,et al.  Equivalence of multiwave coupled-wave theory and modal theory for periodic-media diffraction , 1978 .

[29]  Jan Westerholm,et al.  Kinoform Phase Relief Synthesis: A Stochastic Method , 1989 .

[30]  Roger Petit,et al.  Electromagnetic theory of gratings , 1980 .

[31]  J Jahns,et al.  Two-dimensional array of diffractive microlenses fabricated by thin film deposition. , 1990, Applied optics.

[32]  K. Bean,et al.  Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.

[33]  Michael Hatzakis,et al.  Single-Step Optical Lift-Off Process , 1980, IBM J. Res. Dev..

[34]  Michael T. Gale,et al.  Fabrication of kinoform structures for optical computing. , 1992, Applied optics.

[35]  Asher A. Friesem,et al.  Analytic optimization for holographic optical elements , 1989 .

[36]  Joseph W. Goodman,et al.  International Trends in Optics , 1992 .

[37]  Robert E. Knowlden,et al.  Fabricating binary optics: Process variables critical to optical efficiency , 1991 .

[38]  Mohammad R. Taghizadeh,et al.  Optimization and fabrication of grating beamsplitters in silicon nitride , 1989 .

[39]  H. Hosokawa,et al.  ZnS micro-Fresnel lens and its uses. , 1990, Applied optics.

[40]  M P Dames,et al.  Efficient optical elements to generate intensity weighted spot arrays: design and fabrication. , 1991, Applied optics.

[41]  P. Russell Optical volume holography , 1981 .

[42]  J. Melngailis Focused ion beam technology and applications , 1987 .

[43]  R Dändliker,et al.  Optimized kinoform structures for highly efficient fan-out elements. , 1992, Applied optics.

[44]  Hans Peter Herzig,et al.  Design and fabrication of highly efficient fan-out elements , 1990 .

[45]  J. Vossen Inhibition of chemical sputtering of organics and C by trace amounts of Cu surface contamination , 1976 .

[46]  Shiro Ogata,et al.  Laser diode source integrating a high-diffraction-efficiency micro-Fresnel lens with 05 N.A. fabricated by electron-beam lithography , 1988 .

[47]  S. Michel,et al.  V-2 – Ion Beam Etching , 1991 .

[48]  H. Nishihara Optical integrated circuits , 1989 .

[49]  O. Bryngdahl,et al.  Iterative Fourier-transform algorithm applied to computer holography , 1988 .

[50]  Gary J. Swanson,et al.  Diffractive optical elements for use in infrared systems , 1989 .

[51]  Hans Peter Herzig,et al.  Holographic optical scanning elements: analytical method for determining the phase function , 1987 .

[52]  Mung Chen Is phase-shift mask technology production-worthy? , 1991, Other Conferences.

[53]  James R. Fienup,et al.  Analytic design of optimum holographic optical elements , 1987, Annual Meeting Optical Society of America.

[54]  Jürgen Jahns,et al.  Array generation with multilevel phase gratings , 1990 .

[55]  T. Gaylord,et al.  Analysis and applications of optical diffraction by gratings , 1985, Proceedings of the IEEE.

[56]  Hans Peter Herzig,et al.  High-efficiency continuous surface-relief gratings for two-dimensional array generation. , 1992 .

[57]  Jan Westerholm,et al.  Optimisation and fabrication of grating beamsplitters , 1988 .

[58]  Frank Wyrowski,et al.  Diffractive optical elements: iterative calculation of quantized, blazed phase structures , 1990 .

[59]  James R. Leger,et al.  Coherent addition of AlGaAs lasers using microlenses and diffractive coupling , 1988 .

[61]  Alice E. White,et al.  Application of ≊100 Å linewidth structures fabricated by shadowing techniques , 1981 .

[62]  T. Gaylord,et al.  Diffraction analysis of dielectric surface-relief gratings , 1982 .

[63]  L. Baraldi,et al.  Electron beam writing of continuous resist profiles for optical applications , 1992 .

[64]  Ross C. McPhedran,et al.  Highly conducting lamellar diffraction gratings , 1981 .

[65]  A. Erko,et al.  Fabrication of diffraction X-ray elements , 1989 .