Microscopic surface contouring by fringe projection method

Abstract This paper describes the use of optical fringe projection method for 3D surface profile and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror ( 0.1 mm ×0.1 mm ) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring.

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