Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer
暂无分享,去创建一个
Kazuhiro Hane | Kazunori Takahashi | Yoshiaki Kanamori | Erdal Bulgan | K. Hane | Kazunori Takahashi | Y. Kanamori | E. Bulgan
[1] William S. N. Trimmer,et al. Microrobots and micromechanical systems , 1989 .
[2] Rajesh Rajamani,et al. A high-aspect-ratio two-axis electrostatic microactuator with extended travel range , 2002 .
[3] Yuji Uenishi,et al. Tunable laser diode using a nickel micromachined external mirror , 1996 .
[4] D. L. DeVoe. Thermal issues in MEMS and microscale systems , 2002 .
[5] Rongshun Chen,et al. A novel sequential engagement electrodes for vertical comb-drive actuator , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
[6] K. Nagayama,et al. Local mechanical properties measured by atomic force microscopy for cultured bovine endothelial cells exposed to shear stress. , 2000, Journal of biomechanics.
[7] Larry J. Hornbeck. Projection displays and MEMS: timely convergence for a bright future , 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[8] J. Krayer,et al. Micro-arheometer: High throughput system for measuring of viscoelastic properties of single biological cells , 2006 .
[9] Yasuhiko Arakawa,et al. Si Photonic Wire Waveguide Devices , 2006 .
[10] G. Guillot,et al. Highly selective and widely tunable 1.55-μm InP/air-gap micromachined Fabry-Perot filter for optical communications , 1998, IEEE Photonics Technology Letters.
[11] S.D. Senturia,et al. Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case , 2000, Journal of Microelectromechanical Systems.
[12] M. Esashi,et al. From MEMS to nanomachine , 2005 .
[14] Kazuhiro Hane,et al. Photonic crystal waveguide switch with a microelectromechanical actuator , 2006 .
[15] Farrokh Ayazi,et al. High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes , 2000, IEEE 2000. Position Location and Navigation Symposium (Cat. No.00CH37062).
[16] Li Fan,et al. Design, manufacture and reliability of 2D MEMS optical switches , 2003, Photonics Fabrication Europe.
[17] 羽根 一博,et al. Submicron silicon waveguide optical switch driven by microelectromechanical actuator , 2008 .
[18] H. Fujita,et al. Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware , 2003 .
[19] T. Kenny,et al. Design of large deflection electrostatic actuators , 2003 .
[20] S. Senturia,et al. Computer-aided generation of nonlinear reduced-order dynamic macromodels. II. Stress-stiffened case , 2000, Journal of Microelectromechanical Systems.
[21] K. J. Gabriel,et al. Design, fabrication, and operation of submicron gap comb-drive microactuators , 1992 .
[22] W. Fang,et al. Determining mean and gradient residual stresses in thin films using micromachined cantilevers , 1996 .
[23] Albrecht Ehrmann,et al. Influence of Silicon on Insulator Wafer Stress Properties on Placement Accuracy of Stencil Masks. , 2002 .
[24] Philip Dowd,et al. Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators , 2003 .
[25] J. Mohr,et al. High Aspect Ratio Vertical Cantilever RF-MEMS Variable Capacitor , 2007, IEEE Microwave and Wireless Components Letters.