Work function of Ni silicide phases on HfSiON and SiO/sub 2/: NiSi, Ni/sub 2/Si, Ni/sub 31/Si/sub 12/, and Ni/sub 3/Si fully silicided gates
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C. Vrancken | A. Veloso | S. Biesemans | K. Maex | P. Absil | S. Kubicek | M.J.H. van Dal | K.G. Anil | A. Lauwers | A. Veloso | K. Opsomer | J. Kittl | A. Lauwers | K. Maex | S. Kubicek | P. Absil | S. Biesemans | C. Vrancken | M. V. van Dal | K. Anil | C. Demeurisse | J.A. Kittl | K. Opsomer | M.A. Pawlak | C. Demeurisse | M. Pawlak
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