Design rules and test of electrostatic micromotors made by the LIGA process

Electrostatic stepping micromotors have been designed with regard to low rotor friction on the axle. The design rules are determined using two-dimensional FEM calculations and taking into consideration the particular rotor position during motion. The motors are fabricated by a fully integrated LIGA process. The minimum driving voltages needed are measured to be about 60 V. Determination of the coefficients of friction in operation completes the rules for future designs.

[1]  R. Reuben,et al.  Friction measurements on LIGA-processed microstructures , 1994 .

[2]  T. Christenson,et al.  A first functional current excited planar rotational magnetic micromotor , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[3]  W. Menz,et al.  Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems , 1990 .

[4]  William C. Tang,et al.  Laterally driven polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[5]  Stephen C. Jacobsen,et al.  A design overview of an eccentric-motion electrostatic microactuator (the wobble motor) , 1989 .

[6]  J. Mohr,et al.  The LIGA technique-what are the new opportunities , 1992 .