Macromodeling of Electrostatic Gap and its Application to MEMS Design

Electrostatic gap is an important functional component of MEMS and its macromodel is required for MEMS system-level design. In this paper, spacial macromodel of electrostatic gap is established with analytical method which can describe six DOFs (degrees of freedom) of moving electrode, and its parameterized multi-port-element model coded in mixed-signal hardware description language MAST is realized. A system-level model of capacitive micro-accelerometer composed of multi-port-element models is designed and simulated in the simulation platform SABER. Simulation of the accelerometer indicates that transient analysis of complicated electro-mechanical coupling system which FEM softwares can hardly complete is accomplished quickly in this way.