Optical and mechanical design considerations in the construction of a 24-in. phase-shifting interferometer

WYKO Corporation is currently designing and manufacturing specialized phase shifting interferometers to aid in the qualification of large optics for the U.S. NIF program. The interferometers will be used to qualify homogeneity of raw material and provide in-process inspection information and final inspection qualification data. The 24' systems will be the largest commercially available Fizeau phase shifting interferometers ever manufactured. Systems will be produced using traditional CCD cameras as well as megapixel CCD camera for applications requiring higher lateral resolution. Mechanical and optical design considerations include vibration and distortion control of critical optical elements, polarization control of the laser source, imaging system design, and optical transfer function optimization. We also address effects in the test cavity arising from measuring transmitted and reflected wavefronts of optics mounted at Brewster's angle.