论文信息 - Suppressed variability of current-onset voltage of FinFETs by improvement of work function uniformity of metal gates - 字舞流文

Suppressed variability of current-onset voltage of FinFETs by improvement of work function uniformity of metal gates

K. Endo | Y. Morita | W. Mizubayashi | S. Migita | T. Matsukawa | S. O'Uchi | Y. Liu | M. Masahara | H. Ota | H. Yamauchi | Y. Ishikawa | J. Tsukada