Performance of a novel non-planar diaphragm for high-sensitivity structures

A novel single deeply corrugated diaphragm (SDCD) is presented for high-sensitivity devices. Finite-element model is used to evaluate the mechanical sensitivity, resonance frequency and zero-pressure offset of the SDCD structure. Results show that very high performance of the diaphragm can be achieved using this technique. The optimized fabrication processes to obtain low tensile stress polysilicon film is described. The measurements show reasonable agreements with the theoretical predictions.