Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
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D. Englund | S. Mouradian | R. Kalish | A. Stein | T. Schroder | J. Goldstein | J. Salzman | L. Li | O. Gaathon | I. Bayn | J. Zhang | E.H.Chen | M. Lu | C. Ruggiero