Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators With Integrated Actuation Electrodes
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Renata Melamud | Kuan-Lin Chen | Roger T Howe | R. Howe | T. Kenny | R. Melamud | J. Salvia | Kuan-Lin Chen | Shasha Wang | Shasha Wang | Thomas W Kenny | James C Salvia
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