Investigation on Recrystallization Channel for Vertical C-Shaped-Channel Nanosheet FETs by Laser Annealing
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A. Du | Guilei Wang | Jinbiao Liu | Huilong Zhu | Yong Du | Z. Kong | Jiahan Yu | Yongkui Zhang | Qi Wang | Zijin Yan | Zhuo Chen | W. Xiong | Z. Xiao | S. Lu | Yantong Zheng
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