Computer simulation of dynamic states of the silicon micromotor

This paper presents the results of silicon micromotor static and dynamic simulations by means of finite element method and the Moulton‐Adams algorithm as well. Capacitance and torque curves calculation. The virtual work principle has been applied. The dynamic states of the motor are described by the non‐linear and non‐stationary system of ordinary difference equations solved numerically. Some results of computer simulation of dynamic states are presented and discussed.