论文信息 - HIGH-RESOLUTION MICROPATTERNING OF OFF-STOCHIOMETRIC THIOL-ENES (OSTE) VIA A NOVEL LITHOGRAPHY MECHANISM - 字舞流文

HIGH-RESOLUTION MICROPATTERNING OF OFF-STOCHIOMETRIC THIOL-ENES (OSTE) VIA A NOVEL LITHOGRAPHY MECHANISM

We present an entirely novel, self-limiting photolithography mechanism in off-stoichiometry thiol-ene (OSTE) polymers enabling high-resolution and high-aspect ratio features. The OSTE polymers have ...

Farizah Saharil | Tommy Haraldsson | Wouter van der Wijngaart | Fredrik Forsberg | Frank Niklaus | Fredrik Carlborg | T. Haraldsson | F. Niklaus | F. Forsberg | W. Wijngaart | F. Saharil | J. Mikael Karlsson | J. Karlsson | F. Carlborg

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