Oxidation of Suspended Stacked Silicon Nanowire for Sub-10nm Cross-Section Shape Optimization
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Simon Deleonibus | C. Carabasse | Thomas Ernst | Jean-Michel Hartmann | A. Hubert | S. Becu | C. Vizioz | Cecilia Dupre | V. Maffini-Alvaro | Vincent Delaye | F. Aussenac | Sébastien Pauliac | C. Carabasse | J. Hartmann | S. Deleonibus | J. Colonna | T. Ernst | C. Dupré | A. Hubert | C. Vizioz | V. Delaye | S. Bécu | V. Maffini-Alvaro | F. Aussenac | S. Pauliac | Jean-Philippe Colonna