Equivalent area nonlinear static and dynamic analysis of electrostatically actuated microstructures
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[1] H. Nathanson,et al. The resonant gate transistor , 1967 .
[2] Ali H. Nayfeh,et al. Characterization of the mechanical behavior of an electrically actuated microbeam , 2002 .
[3] Muthukumaran Packirisamy,et al. Boundary characterization of MEMS structures through electro-mechanical testing , 2008 .
[4] Stewart McWilliam,et al. Optimization of a Cantilever Microswitch with Piezoelectric Actuation , 2004 .
[5] D. DeVoe,et al. Fabrication of suspended piezoelectric microresonators , 1999 .
[6] Muthukumaran Packirisamy,et al. Dynamic testing of micromechanical structures under thermo-electro-mechanical influences , 2007 .
[7] M. Packirisamy,et al. An improved method for predicting microfabrication influence in atomic force microscopy performances , 2004 .
[8] Shiuh-Jer Huang,et al. Some design considerations on the electrostatically actuated microstructures , 2004 .
[9] Albert C. J. Luo,et al. Nonlinear dynamics of a micro-electro-mechanical system with time-varying capacitors , 2004 .
[10] Kristofer S. J. Pister,et al. Analysis of closed-loop control of parallel-plate electrostatic microgrippers , 1994, Proceedings of the 1994 IEEE International Conference on Robotics and Automation.
[11] P. Hagedorn. Non-Linear Oscillations , 1982 .
[12] Pol D. Spanos,et al. Non-Linear Oscillations, 2nd ed. , 1990 .
[13] T. Hubbard,et al. Force, deflection and power measurements of toggled microthermal actuators , 2004 .