레이저 다이오드 CMP 공정에서의 안전관리 방안에 관한 연구

Laser industry is a costly investment industry. And there are various risk factors such as water, steam, gas, chemicals, air conditioning, and cooling system. Some studies revealed the relevance of such manufacturing processes and malignant melanoma, lung cancer, stomach cancer, breast cancer, brain cancer. However, research on the safety situation of industrial workers is insufficient. In this study, we have identified the laser diode CMP(Chemical Mechanical Polishing) process potential risks and proposed a safety management measures using working environment measurement, risk assessment, the result of a fire simulation. The exposure levels of harmful factors occurring in the CMP process were significantly lower than the limits and were equivalent to other processes. But if there is low efficiency in enclosing hood wet station it can not be quickly removed. Therefore, hood should be maintained so that appropriate control wind speed. KRAS(Korea Risk Assessment System) risk assessment is necessary managerial measures such as beaker replacement, identify facilities improvement measures, and wearing protective equipment. And measures to improve processes, facilities and equipment are needed. In particular, the frequency of fire in the CMP process is low, but the risk factors can not be ignored because of the high intensity of the incident. FDS(Fire Dynamic Simulator) fire simulation results should be linked to install the air conditioning system to automatically stop forward rather than sprinklers. And to reduce the risk of fire, acetone during storage should be away over far more than hot plate with 0.29m.