论文信息 - Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer

Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer

In this paper, variations of folded beam suspension design are analyzed and simulated in order to study its effect on the performance of an area-changed MEMS lateral capacitive accelerometer. The simulation was carried out using Coventorware2003. Mechanical issues like spring constants, stress distributions, cross-axis sensitivities and shock survivability are discussed.

B.Y. Majlis | B. Bais

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