Characterization and modelling of ageing failures on power MOSFET devices

A method based on the failure analysis of power MOSFET devices tested under extreme electrothermal fatigue is proposed. Failure modes are associated to several structural changes that have been investigated through acoustic, electron and ion microscopy. The main aging mode is related to the exponential increase in drain resistance due to delamination at the die attach. Earlier failures are observed when very local defects due to electrical over stresses (EOS) occur at the source metallization or at the wire bonding. Aging models were elaborated to account for the die attach delamination, but are still lacking to take in account the structural evolution of the Al metallization. This new methodology, based on accelerated tests and structural observations aims at designing a new generation of power components that will be more reliable.

[1]  C. Thompson Structure Evolution During Processing of Polycrystalline Films , 2000 .

[2]  Huajian Gao,et al.  Crack-like grain-boundary diffusion wedges in thin metal films , 1999 .

[3]  Marc Legros,et al.  Microstructural evolution in passivated Al films on Si substrates during thermal cycling , 2002 .

[4]  Philippe Dupuy,et al.  Innovative Methodology for Predictive Reliability of Intelligent Power Devices Using Extreme Electro-thermal Fatigue , 2005, Microelectron. Reliab..

[5]  Marc Legros,et al.  Plasticity-Related Phenomena in Metallic Films on Substrates , 2003 .

[6]  A. Benmansour,et al.  Assessment of the Trench IGBT reliability: low temperature experimental characterization , 2005, Microelectron. Reliab..

[7]  William D. Nix,et al.  Mechanical properties of thin films , 1989 .

[8]  K. Ketata,et al.  Reliability study of power RF LDMOS device under thermal stress , 2007, Microelectron. J..

[9]  Masayasu Ishiko,et al.  Design concept for wire-bonding reliability improvement by optimizing position in power devices , 2006, Microelectron. J..

[10]  Francesco Iannuzzo,et al.  Investigation of MOSFET failure in soft-switching conditions , 2006, Microelectron. Reliab..

[11]  Roland Müller-Fiedler,et al.  Reliability aspects of microsensors and micromechatronic actuators for automotive applications , 2003, Microelectron. Reliab..

[12]  Philippe Dupuy,et al.  Alterations induced in the structure of intelligent power devices by extreme electro-thermal fatigue , 2007 .

[13]  T. O'sullivan,et al.  Mechanical Properties of Thin Films , 1990 .